The Metallifier sputter coater is aimed at University laboratories requiring a versatile system capable of depositing a wide range of metal coatings with fine control over deposition rate and pressure.
Features:
- Up to four 4” magnetrons
- DC power supply
- Dry pumping system
- Process pressure reached in ~45 minutes
- PID pressure control
- Coating of up to six 4” samples in a single sputter session
- Unlimited number of layers per sample
- Two process gases allow reactive sputtering
- Intuitive, representative and safe interface
- Pressure-interlocked operation of valves prevent accidental damage to system components, i.e. turbo pump
- One-click pumpdown and vent operations deal with all steps required for safe evacuation and venting of chamber from any state
- High resolution rotary encoder position feedback for shutters
- Status messages
- Safe manual operation or recipe-driven sputtering
- Simple recipe interface
- Easily detachable sample stage and shutter to facilitate system cleaning
- Shuttered viewport
- Developed and tested at Cambridge University
Email: sales@precisionatomics.com
Phone: +44 7720 843352
for a quote, or download our brochure here.
Versatile equipment for research and test laboratories
